@misc{indiciaee857e81099a8,
  title = {Isotropic atomic layer etching of MgO-doped lithium niobate using sequential exposures of H\$\_2\$ and SF\$\_6\$ plasmas},
  author = {Ivy I. Chen and Jennifer Solgaard and Ryoto Sekine and Azmain A. Hossain and Anthony Ardizzi and David S. Catherall and Alireza Marandi and James R. Renzas and Frank Greer and Austin J. Minnich},
  year = {2024},
  url = {https://arxiv.org/abs/2310.10592},
  note = {Source identifier: 2310.10592}
}