@misc{indiciae0d9a87da6d59, title = {Creation of color centers in diamond by recoil implantation through dielectric films}, author = {Yuyang Han and Christian Pederson and Bethany E. Matthews and Nicholas S. Yama and Maxwell F. Parsons and Kai-Mei C. Fu}, year = {2023}, url = {https://arxiv.org/abs/2310.12484}, note = {Source identifier: 2310.12484} }