TY  - RPRT
TI  - Creation of color centers in diamond by recoil implantation through dielectric films
AU  - Yuyang Han
AU  - Christian Pederson
AU  - Bethany E. Matthews
AU  - Nicholas S. Yama
AU  - Maxwell F. Parsons
AU  - Kai-Mei C. Fu
PY  - 2023
UR  - https://arxiv.org/abs/2310.12484
ID  - 2310.12484
ER  -