@misc{indiciae5a731fdf63d6,
  title = {Contact holes in vertical electrode structures analyzed by voltage contrast-SEM and conducting AFM},
  author = {Minsun Gu and Moon Seop Hyun and Moonsup Han and Gyungtae Kim and Young Jun Chang},
  year = {2023},
  doi = {10.1016/j.cap.2023.06.003},
  url = {https://arxiv.org/abs/2310.14212},
  note = {Source identifier: 2310.14212}
}