TY  - RPRT
TI  - Contact holes in vertical electrode structures analyzed by voltage contrast-SEM and conducting AFM
AU  - Minsun Gu
AU  - Moon Seop Hyun
AU  - Moonsup Han
AU  - Gyungtae Kim
AU  - Young Jun Chang
PY  - 2023
DO  - 10.1016/j.cap.2023.06.003
UR  - https://arxiv.org/abs/2310.14212
ID  - 2310.14212
ER  -