@misc{indiciae9561c1f57da3, title = {Deep learning denoiser assisted roughness measurements extraction from thin resists with low Signal-to-Noise Ratio(SNR) SEM images: analysis with SMILE}, author = {Sara Sacchi and Bappaditya Dey and Iacopo Mochi and Sandip Halder and Philippe Leray}, year = {2023}, url = {https://arxiv.org/abs/2310.14815}, note = {Source identifier: 2310.14815} }