TY  - RPRT
TI  - Deep learning denoiser assisted roughness measurements extraction from thin resists with low Signal-to-Noise Ratio(SNR) SEM images: analysis with SMILE
AU  - Sara Sacchi
AU  - Bappaditya Dey
AU  - Iacopo Mochi
AU  - Sandip Halder
AU  - Philippe Leray
PY  - 2023
UR  - https://arxiv.org/abs/2310.14815
ID  - 2310.14815
ER  -