@misc{indiciaeffd3f1b8d742,
  title = {Electrothermal Actuation of NEMS Resonators: Modeling and Experimental Validation},
  author = {Monan Ma and Kamil L. Ekinci},
  year = {2023},
  doi = {10.1063/5.0157807},
  url = {https://arxiv.org/abs/2310.16196},
  note = {Source identifier: 2310.16196}
}