TY  - RPRT
TI  - Electrothermal Actuation of NEMS Resonators: Modeling and Experimental Validation
AU  - Monan Ma
AU  - Kamil L. Ekinci
PY  - 2023
DO  - 10.1063/5.0157807
UR  - https://arxiv.org/abs/2310.16196
ID  - 2310.16196
ER  -