@misc{indiciaea376cebc9aad,
  title = {Al\$\_3\$Sc thin films for advanced interconnect applications},
  author = {Jean-Philippe Soulié and Kiroubanand Sankaran and Valeria Founta and Karl Opsomer and Christophe Detavernier and Joris Van de Vondel and Geoffrey Pourtois and Zsolt Tőkei and Johan Swerts and Christoph Adelmann},
  year = {2024},
  doi = {10.1016/j.mee.2024.112141},
  url = {https://arxiv.org/abs/2310.20485},
  note = {Source identifier: 2310.20485}
}