@misc{indiciae3fc8531e4111,
  title = {Fabrication of quantum emitters in aluminium nitride by Al-ion implantation and thermal annealing},
  author = {E. Nieto Hernández and H. B. Yağcı and V. Pugliese and P. Aprà and J. K. Cannon and S. G. Bishop and J. Hadden and S. Ditalia Tchernij and Olivero and A. J. Bennett and J. Forneris},
  year = {2023},
  doi = {10.1063/5.0185534},
  url = {https://arxiv.org/abs/2310.20540},
  note = {Source identifier: 2310.20540}
}