@misc{indiciae1f0164fb9a3b,
  title = {Silicon Implantation and Annealing in \$β\$-Ga\$\_2\$O\$\_3\$: Role of Ambient, Temperature, and Time},
  author = {K. R. Gann and N. Pieczulewski1 and C. A. Gorsak and K. Heinselman and T. J. Asel and B. A. Noesges and K. T. Smith and D. M. Dryden and H. G. Xing and H. P. Nair and D. A. Muller and M. O. Thompson},
  year = {2023},
  url = {https://arxiv.org/abs/2311.00821},
  note = {Source identifier: 2311.00821}
}