@misc{indiciae062f92ed4890,
  title = {Tunable Defect Engineering of Mo/TiON Electrode in Angstrom-Laminated HfO\$\_2\$/ZrO\$\_2\$ Ferroelectric Capacitors towards Long Endurance and High Temperature Retention},
  author = {Sheng-Min Wang and Cheng-Rui Liu and Yu-Ting Chen and Shao-Chen Lee and Ying-Tsan Tang},
  year = {2023},
  url = {https://arxiv.org/abs/2311.02886},
  note = {Source identifier: 2311.02886}
}