TY  - RPRT
TI  - Tunable Defect Engineering of Mo/TiON Electrode in Angstrom-Laminated HfO$_2$/ZrO$_2$ Ferroelectric Capacitors towards Long Endurance and High Temperature Retention
AU  - Sheng-Min Wang
AU  - Cheng-Rui Liu
AU  - Yu-Ting Chen
AU  - Shao-Chen Lee
AU  - Ying-Tsan Tang
PY  - 2023
UR  - https://arxiv.org/abs/2311.02886
ID  - 2311.02886
ER  -