@misc{indiciaea0ecc10ad893, title = {Sub-5-nm Ultra-thin In\$\_2\$O\$\_3\$ Transistors for High-Performance and Low-Power Electronic Applications}, author = {Linqiang Xu and Lianqiang Xu and Jun Lan and Yida Li and Qiuhui Li and Aili Wang and Ying Guo and Yee Sin Ang and Ruge Quhe and Jing Lu}, year = {2023}, url = {https://arxiv.org/abs/2311.02943}, note = {Source identifier: 2311.02943} }