@misc{indiciaebdfddf205b8c,
  title = {Single-Atom Control of Arsenic Incorporation in Silicon for High-Yield Artificial Lattice Fabrication},
  author = {Taylor J. Z. Stock and Oliver Warschkow and Procopios C. Constantinou and David R. Bowler and Steven R. Schofield and Neil J. Curson},
  year = {2023},
  url = {https://arxiv.org/abs/2311.05752},
  note = {Source identifier: 2311.05752}
}