TY  - RPRT
TI  - Single-Atom Control of Arsenic Incorporation in Silicon for High-Yield Artificial Lattice Fabrication
AU  - Taylor J. Z. Stock
AU  - Oliver Warschkow
AU  - Procopios C. Constantinou
AU  - David R. Bowler
AU  - Steven R. Schofield
AU  - Neil J. Curson
PY  - 2023
UR  - https://arxiv.org/abs/2311.05752
ID  - 2311.05752
ER  -