@misc{indiciae3a303ad5ac66, title = {Near 6 GHz Sezawa Mode Surface Acoustic Wave Resonators using AlScN on SiC}, author = {Xingyu Du and Nishant Sharma and Zichen Tang and Chloe Leblanc and Deep Jariwala and Roy H. Olsson III}, year = {2023}, url = {https://arxiv.org/abs/2311.08694}, note = {Source identifier: 2311.08694} }