@misc{indiciae8f5f70942ce3,
  title = {A high-efficiency programmable modulator for extreme ultraviolet light with nm feature size based on an electronic phase transition},
  author = {Igor Vaskivskyi and Anze Mraz and Rok Venturini and Gregor Jecl and Yevhenii Vaskivskyi and Riccardo Mincigrucci and Laura Foglia and Dario De Angelis and Jacopo-Stefano Pelli-Cresi and Ettore Paltanin and Danny Fainozzi and Filippo Bencivenga and Claudio Masciovecchio and Dragan Mihailovic},
  year = {2023},
  doi = {10.1038/s41566-024-01389-z},
  url = {https://arxiv.org/abs/2311.08809},
  note = {Source identifier: 2311.08809}
}