@misc{indiciaee89b83d5ff33,
  title = {Properties of Nb\textbackslash{}\_xTi\textbackslash{}\_\{(1-x)\}N thin films deposited on 300 mm silicon wafers for upscaling superconducting digital circuits},
  author = {Daniel Pérez Lozano and Jean-Philippe Soulié and Blake Hodges and Xiaoyu Piao and Sabine O'Neal and Anne-Marie Valente-Feliciano and Quentin Herr and Zsolt Tőkei and Min-Soo Kim and Anna Herr},
  year = {2023},
  doi = {10.1088/1361-6668/ad4b61},
  url = {https://arxiv.org/abs/2311.09772},
  note = {Source identifier: 2311.09772}
}