@misc{indiciae71c99f791d74,
  title = {Non-destructive depth reconstruction of Al-Al\$\_2\$Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography},
  author = {Johann Jakob Abel and Jonathan Apell and Felix Wiesner and Julius Reinhard and Martin Wünsche and Nadja Felde and Gabriele Schmidl and Jonathan Plentz and Gerhard G. Paulus and Stephanie Lippmann and Silvio Fuchs},
  year = {2023},
  url = {https://arxiv.org/abs/2311.10743},
  note = {Source identifier: 2311.10743}
}