@misc{indiciaef3d025f7799b,
  title = {Benchmarking Feature Extractors for Reinforcement Learning-Based Semiconductor Defect Localization},
  author = {Enrique Dehaerne and Bappaditya Dey and Sandip Halder and Stefan De Gendt},
  year = {2023},
  doi = {10.1109/elmar59410.2023.10253916},
  url = {https://arxiv.org/abs/2311.11145},
  note = {Source identifier: 2311.11145}
}