TY  - RPRT
TI  - Benchmarking Feature Extractors for Reinforcement Learning-Based Semiconductor Defect Localization
AU  - Enrique Dehaerne
AU  - Bappaditya Dey
AU  - Sandip Halder
AU  - Stefan De Gendt
PY  - 2023
DO  - 10.1109/elmar59410.2023.10253916
UR  - https://arxiv.org/abs/2311.11145
ID  - 2311.11145
ER  -