TY - RPRT TI - Improved Defect Detection and Classification Method for Advanced IC Nodes by Using Slicing Aided Hyper Inference with Refinement Strategy AU - Vic De Ridder AU - Bappaditya Dey AU - Victor Blanco AU - Sandip Halder AU - Bartel Van Waeyenberge PY - 2023 UR - https://arxiv.org/abs/2311.11439 ID - 2311.11439 ER -