@misc{indiciae44c04fe7407f,
  title = {Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes},
  author = {Sinwoo Cho and Omar Barrera and Pietro Simeoni and Ellie Y. Wang and Jack Kramer and Vakhtang Chulukhadze and Joshua Campbell and Matteo Rinaldi and Ruochen Lu},
  year = {2023},
  doi = {10.1109/mems58180.2024.10439299},
  url = {https://arxiv.org/abs/2311.13448},
  note = {Source identifier: 2311.13448}
}