@misc{indiciae8751b0185637,
  title = {Application of Machine Learning Method to Model-Based Library Approach to Critical Dimension Measurement by CD-SEM},
  author = {P. Guo and H. Miao and Y. B. Zou and S. F. Mao and Z. J. Ding},
  year = {2023},
  url = {https://arxiv.org/abs/2311.14947},
  note = {Source identifier: 2311.14947}
}