TY - RPRT TI - Guiding principles for the design of a chemical vapor deposition process for highly crystalline transition metal dichalcogenides AU - Vladislav Voronenkov AU - Benjamin Groven AU - Henry Medina Silva AU - Pierre Morin AU - Stefan De Gendt PY - 2024 DO - 10.1002/pssa.202300943 UR - https://arxiv.org/abs/2311.15007 ID - 2311.15007 ER -