@misc{indiciae017b479a3067,
  title = {Digital Transformation of High Voltage Isolation Control and Monitoring System for HVE-400 Ion Implanter},
  author = {Chengbo Li and Xuepeng Sun and Zhiguo Liu and Chungang Guo and Xiaoming Li},
  year = {2023},
  url = {https://arxiv.org/abs/2311.16164},
  note = {Source identifier: 2311.16164}
}