@misc{indiciaed7a4a06dd6f5,
  title = {Evaluation of X-ray/EUV Nanolithography Facility at AS Through Wavefront Propagation Simulations},
  author = {Jerome B. M. Knappett and Blair Haydon and Bruce C. C. Cowie and Cameron M. Kewish and Grant A. van Riessen},
  year = {2023},
  url = {https://arxiv.org/abs/2311.16458},
  note = {Source identifier: 2311.16458}
}