TY  - RPRT
TI  - Evaluation of X-ray/EUV Nanolithography Facility at AS Through Wavefront Propagation Simulations
AU  - Jerome B. M. Knappett
AU  - Blair Haydon
AU  - Bruce C. C. Cowie
AU  - Cameron M. Kewish
AU  - Grant A. van Riessen
PY  - 2023
UR  - https://arxiv.org/abs/2311.16458
ID  - 2311.16458
ER  -