@misc{indiciaeea72ec50250e,
  title = {Sputtered NbN Films for Ultrahigh Performance Superconducting Nanowire Single-Photon Detectors},
  author = {Ilya A. Stepanov and Aleksandr S. Baburin and Danil V. Kushnev and Evgeniy V. Sergeev and Oksana I. Shmonina and Aleksey R. Matanin and Vladimir V. Echeistov and Ilya A. Ryzhikov and Yuri V. Panfilov and Ilya A. Rodionov},
  year = {2023},
  doi = {10.1063/5.0188420},
  url = {https://arxiv.org/abs/2311.17000},
  note = {Source identifier: 2311.17000}
}