@misc{indiciae76ae36ddf163,
  title = {Numerical simulation of flow field and debris migration in extreme ultraviolet source vessel},
  author = {Wen-Sheng Meng and Chao-Ben Zhao and Jian-Zhao Wu and Bo-Fu Wang and Quan Zhou and Kai Leong Chong},
  year = {2023},
  doi = {10.1063/5.0190136},
  url = {https://arxiv.org/abs/2312.01862},
  note = {Source identifier: 2312.01862}
}