@misc{indiciaeef67bec1f5b1,
  title = {Modeling and Design Optimization of a Linear Motor with Halbach Array for Semiconductor Manufacturing Technology},
  author = {Sajjad Mohammadi and Jeffrey H. Lang and James L. Kirtley and David L. Trumper},
  year = {2024},
  url = {https://arxiv.org/abs/2312.04053},
  note = {Source identifier: 2312.04053}
}