TY  - RPRT
TI  - Modeling and Design Optimization of a Linear Motor with Halbach Array for Semiconductor Manufacturing Technology
AU  - Sajjad Mohammadi
AU  - Jeffrey H. Lang
AU  - James L. Kirtley
AU  - David L. Trumper
PY  - 2024
UR  - https://arxiv.org/abs/2312.04053
ID  - 2312.04053
ER  -