@misc{indiciae116c4b2d79ea,
  title = {Optimizing the quality factor of InP nanobeam cavities using atomic layer deposition},
  author = {Mohammad Habibur Rahaman and Chang-Min Lee and Mustafa Atabey Buyukkaya and Samuel Harper and Fariba Islam and Edo Waks},
  year = {2023},
  url = {https://arxiv.org/abs/2312.05967},
  note = {Source identifier: 2312.05967}
}