TY  - RPRT
TI  - Optimizing the quality factor of InP nanobeam cavities using atomic layer deposition
AU  - Mohammad Habibur Rahaman
AU  - Chang-Min Lee
AU  - Mustafa Atabey Buyukkaya
AU  - Samuel Harper
AU  - Fariba Islam
AU  - Edo Waks
PY  - 2023
UR  - https://arxiv.org/abs/2312.05967
ID  - 2312.05967
ER  -