@misc{indiciae0cd2964be49b,
  title = {Local laser-induced solid-phase recrystallization of phosphorus-implanted Si/SiGe heterostructures for contacts below 4.2 K},
  author = {Malte Neul and Isabelle V. Sprave and Laura K. Diebel and Lukas G. Zinkl and Florian Fuchs and Yuji Yamamoto and Christian Vedder and Dominique Bougeard and Lars R. Schreiber},
  year = {2023},
  doi = {10.1103/physrevmaterials.8.043801},
  url = {https://arxiv.org/abs/2312.06267},
  note = {Source identifier: 2312.06267}
}