@misc{indiciaec923b2b8484d,
  title = {Plasma-Based Etching Approach for GEM Detector Microfabrication at FBK for X-ray polarimetry in space},
  author = {A. Lega and D. Novel and T. Facchinelli and C. Sgro' and L. Baldini and M. Minuti and M. Boscardin and G. Pepponi and R. Iuppa and R. Hall-Wilton and L. Latronico},
  year = {2024},
  url = {https://arxiv.org/abs/2312.07108},
  note = {Source identifier: 2312.07108}
}