@misc{indiciae2647084b1f92,
  title = {Applying Machine Learning Models on Metrology Data for Predicting Device Electrical Performance},
  author = {Bappaditya Dey and Anh Tuan Ngo and Sara Sacchi and Victor Blanco and Philippe Leray and Sandip Halder},
  year = {2023},
  url = {https://arxiv.org/abs/2312.09462},
  note = {Source identifier: 2312.09462}
}