TY  - RPRT
TI  - Applying Machine Learning Models on Metrology Data for Predicting Device Electrical Performance
AU  - Bappaditya Dey
AU  - Anh Tuan Ngo
AU  - Sara Sacchi
AU  - Victor Blanco
AU  - Philippe Leray
AU  - Sandip Halder
PY  - 2023
UR  - https://arxiv.org/abs/2312.09462
ID  - 2312.09462
ER  -