@misc{indiciae1838d9cd09d5,
  title = {Plasma-enhanced atomic layer deposition of titanium nitride for superconducting devices},
  author = {John Femi-Oyetoro and Sasha Sypkens and Henry LeDuc and Matthew Dickie and Andrew Beyer and Peter Day and Frank Greer},
  year = {2023},
  url = {https://arxiv.org/abs/2312.09984},
  note = {Source identifier: 2312.09984}
}