@misc{indiciaeefe2dd87c510,
  title = {Squeeze film absolute pressure sensors with sub-millipascal sensitivity},
  author = {Mohsen Salimi and Robin V. Nielsen and Henrik B. Pedersen and Aurélien Dantan},
  year = {2024},
  doi = {10.1016/j.sna.2024.115450},
  url = {https://arxiv.org/abs/2312.11915},
  note = {Source identifier: 2312.11915}
}