TY  - RPRT
TI  - Squeeze film absolute pressure sensors with sub-millipascal sensitivity
AU  - Mohsen Salimi
AU  - Robin V. Nielsen
AU  - Henrik B. Pedersen
AU  - Aurélien Dantan
PY  - 2024
DO  - 10.1016/j.sna.2024.115450
UR  - https://arxiv.org/abs/2312.11915
ID  - 2312.11915
ER  -