TY - RPRT TI - Effect of Overheat and Direct Flow Loading on the MEMS Bistable Flow Sensor AU - Ivan Litvinov AU - Dan Refaeli AU - Alex Liberzon AU - Slava Krylov PY - 2024 DO - 10.1016/j.sna.2024.115312 UR - https://arxiv.org/abs/2312.12860 ID - 2312.12860 ER -