@misc{indiciaeb908275d0b88,
  title = {Dynamic evolution of internal stress, grain growth, and crystallographic texture in arc-evaporated AlTiN thin films using in-situ synchrotron x-ray diffraction},
  author = {Sanjay Nayak and Tun-Wei Hsu and Robert Boyd and Jens Gibmeier and Norbert Schell and Jens Birch and Lina Rogström and Magnus Odén},
  year = {2023},
  url = {https://arxiv.org/abs/2312.13160},
  note = {Source identifier: 2312.13160}
}