TY  - RPRT
TI  - Dynamic evolution of internal stress, grain growth, and crystallographic texture in arc-evaporated AlTiN thin films using in-situ synchrotron x-ray diffraction
AU  - Sanjay Nayak
AU  - Tun-Wei Hsu
AU  - Robert Boyd
AU  - Jens Gibmeier
AU  - Norbert Schell
AU  - Jens Birch
AU  - Lina Rogström
AU  - Magnus Odén
PY  - 2023
UR  - https://arxiv.org/abs/2312.13160
ID  - 2312.13160
ER  -