@misc{indiciae22c7360a283b,
  title = {Coherent Fourier Scatterometry for detection of killer defects on silicon carbide samples},
  author = {Jila Rafighdoost and Dmytro Kolenov and Silvania F. Pereira},
  year = {2023},
  url = {https://arxiv.org/abs/2312.13290},
  note = {Source identifier: 2312.13290}
}