TY  - RPRT
TI  - Coherent Fourier Scatterometry for detection of killer defects on silicon carbide samples
AU  - Jila Rafighdoost
AU  - Dmytro Kolenov
AU  - Silvania F. Pereira
PY  - 2023
UR  - https://arxiv.org/abs/2312.13290
ID  - 2312.13290
ER  -