@misc{indiciae57ea156f6a5c,
  title = {Annealing reduces Si\$\_3\$N\$\_4\$ microwave-frequency dielectric loss in superconducting resonators},
  author = {Sarang Mittal and Kazemi Adachi and Nicholas E. Frattini and Maxwell D. Urmey and Sheng-Xiang Lin and Alec L. Emser and Cyril Metzger and Luca Talamo and Sarah Dickson and David Carlson and Scott B. Papp and Cindy A. Regal and Konrad W. Lehnert},
  year = {2024},
  doi = {10.1103/physrevapplied.21.054044},
  url = {https://arxiv.org/abs/2312.13504},
  note = {Source identifier: 2312.13504}
}