@misc{indiciae4efe39b4842d,
  title = {Improving magnetic-field resilience of NbTiN planar resonators using a hard-mask fabrication technique},
  author = {Arne Bahr and Matteo Boselli and Benjamin Huard and Audrey Bienfait},
  year = {2023},
  doi = {10.1063/5.0191393},
  url = {https://arxiv.org/abs/2312.13703},
  note = {Source identifier: 2312.13703}
}